A leak is detected through the helium leak test by charging helium gas to the tested work and passing the leaked gas through the mass analyzer tube to detect helium only.
Helium is used for the gas to be charged in the tested work. For concentration, helium gas of 100% as well as dilute gas canbe used. In addition, the used helium gas can be collected and used again again since helium gas is costly.
The leaked helium gas is ionized by the electron beam from the filament within the ion chamber of the analyzing tube. The ions are accelerated and move out through a slit and then pass through the magnetic field generated by the analyzer. Since the circular trajectories
of the ions depend on their mass, the collector can catch only the helium ions and detect helium.
The bell jar method is widely applied for the helium leak test. In the bell jar method, helium gas is charged by depressurizing the work so that the concentration of helium gas is not decreased by atmospheric pressure. Gas in the chamber is sucked to detect leaked helium and judged by the detector. Helium inside the work is discharged and cleaned with nitrogen gas.